Hydrogen sensor, and processing method and usage thereof

The invention provides a hydrogen sensor, and a processing method and usage thereof, and belongs to the field of hydrogen sensors. The hydrogen sensor obtained by an MEMS processing process comprisesa silicon substrate, a heat insulating layer is arranged on an upper surface of the silicon substrate, a pair of heat insulating grooves extending to the heat insulating layer is formed in a lower surface of the silicon substrate, the first noble metal catalyst layer and a second noble metal catalyst layer directly above the heat insulating grooves are arranged on the surface of the heat insulating layer, an surface of the first precious metal catalyst layer is covered with an insulating air layer, an air hole is formed in the second noble metal catalyst layer, and the first noble metal catalyst layer and the second noble metal catalyst layer are connected in series with a pair of low temperature coefficient reference resistors to form a Wheatstone bridge. A temperature sensitive resistoris disposed above the sili