Wafer substrate and ion implantation equipment

Disclosed are a wafer substrate and ion implantation equipment. The wafer substrate comprises a wafer carrying platform, a plurality of detection pins, and a displacement sensor, wherein multiple mounting holes are formed in the wafer carrying platform; the multiple detection pins are positioned in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHI ZHIPING, HONG JILUN, NI MINGMING, WU ZONGYOU, LIN ZONGXIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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