Method for repairing damaged graphite boat blade

The invention provides a method for repairing a damaged graphite boat blade. The method comprises the steps that a blade of the damaged graphite boat is demounted; a repairing area is set on the damaged blade; a damaged portion is cut off along the repairing area, a repairing tool is used to cut out...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HE JIANGBIAN, YU YANG, HU RONGLIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	The invention provides a method for repairing a damaged graphite boat blade. The method comprises the steps that a blade of the damaged graphite boat is demounted; a repairing area is set on the damaged blade; a damaged portion is cut off along the repairing area, a repairing tool is used to cut out a to-be-used part of a scrapped graphite boat blade, the to-be-used part and a cut to-be-repaired part can be combined into one complete blade and assembled on the graphite boat, and then calibration and repairing are conducted on a boat clamping mounting device; or, a patch piece is cut off from the scrapped graphite boat blade, the patch piece fixedly covers the two sides of a crack of a damaged portion in the repairing area, the graphite boat is assembled, and then calibration and repairingare conducted on the boat clamping mounting device; the repaired graphite boat is cleaned and dried; dummy silicon wafers are inserted into the repaired graphite boat, the repaired graphite boat is put into a tubular anti-ref