Method for repairing hot end dusts on surface of optical element

The invention discloses a method for repairing hot end dusts on the surface of an optical element. The method comprises the following steps that a polishing liquid is prepared first, and the polishingliquid is obtained by diluting nanometer polishing particles with the particle size being less than...

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Bibliographische Detailangaben
Hauptverfasser: HU JIANGCHUAN, CAI CHAO, WANG GANG, HE XIANG, YAN DINGYAO, HU QING, HUANG JINYONG, MA PING, XIE LEI, ZHAO HENG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a method for repairing hot end dusts on the surface of an optical element. The method comprises the following steps that a polishing liquid is prepared first, and the polishingliquid is obtained by diluting nanometer polishing particles with the particle size being less than 500 nm with water; low-removal-rate even polishing is conducted on the surface of the optical element according to a preset polishing path by adopting the prepared polishing liquid and utilizing a flexible air bag polishing head; and finally, the optical element is cleaned, and the residual polishing liquid remaining on the surface of the optical element is removed. According to the method for repairing the hot end dusts on the surface of the optical element, the hot end dusts on the surface ofthe optical element are effectively and completely removed through low-removal-rate surface even polishing treatment, the quality of surface roughness is improved, meanwhile, an original high wavefront index of the optical el