Substrate lifting device of mask aligner

The present invention relates to a substrate lifting device comprising: a variable lift pin for supporting a substrate; a pin plate that can be lifted and lowered; a lifting portion for lifting the pin plate; and a switching portion coupled to the variable lift pin. The switching portion includes a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BAE, YEONG JAE, HAN, KYONG JUN, KIM, JIN CHEOL, SEO, HAN GI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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