Substrate lifting device of mask aligner

The present invention relates to a substrate lifting device comprising: a variable lift pin for supporting a substrate; a pin plate that can be lifted and lowered; a lifting portion for lifting the pin plate; and a switching portion coupled to the variable lift pin. The switching portion includes a switching member that is switched between a support mode and a release mode, wherein the support mode means that the pin plate supports the switching portion, and the variable lift pin is lifted and lowered by the pin plate to support the substrate; the releasing mode is to release the support of the pin plate, so that the pin plate separately lifts and lowers the variable lift pin. 本发明涉及基板升降装置，包括：可变升降销，用于支撑基板；可升降的销板；升降部，用于升降所述销板；以及切换部，结合所述可变升降销；所述切换部包括切换部件，所述切换部件切换于支撑模式以及解除模式之间，其中所述支撑模式是由所述销板支撑所述切换部，进而通过所述销板升降所述可变升降销进行升降来支撑所述基板；所述解除模式是解除对所述销板的支撑，以使所述销板对所述可变升降销单独进行升降。