Directional cutting device used for gallium nitride crystals and machining method
The invention provides a directional cutting device used for gallium nitride crystals and a machining method. The directional cutting device comprises a clamp for clamping crystal ingots, an image monitoring system for controlling the first-piece thickness, and a multi-wire cutting machine for cutti...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention provides a directional cutting device used for gallium nitride crystals and a machining method. The directional cutting device comprises a clamp for clamping crystal ingots, an image monitoring system for controlling the first-piece thickness, and a multi-wire cutting machine for cutting the crystal ingots; the clamp for clamping the crystal ingots comprises a support and a base forsupporting the support; and the image monitoring system compares the line spacing of the multi-wire cutting machine with the spectrum of the first-piece thickness of the crystal ingots so as to adjustthe cutting position. The directional cutting device can effectively control the cutting thickness of the first piece of the gallium nitride crystal ingots.
本发明提供种用于氮化镓晶体的定向切割装置与加工方法,该定向切割装置包括:夹持晶锭的夹具;控制首片厚度的影像监测系统,以及对所述晶锭进行切割的多线切割机,夹持晶锭的所述夹具包括支架和支撑所述支架的基座,所述影像监测系统将所述多线切割机的线间距与待切的所述晶锭的首片厚度的图谱比对以调整切割位置。本发明可有效控制氮化镓晶锭首片的切割厚度。 |
---|