Second-stage symmetric flexible hinge amplification mechanism based piezoelectric stack micro-pump
The invention discloses a second-stage symmetric flexible hinge amplification mechanism based piezoelectric stack micro-pump which comprises a one-way outlet valve, a one-way inlet valve, a valve cover, a pump cavity, buffer channels, elastic balls, a sealing ring, a vibration membrane, an upper fla...
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Format: | Patent |
Sprache: | chi ; eng |
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