Second-stage symmetric flexible hinge amplification mechanism based piezoelectric stack micro-pump

The invention discloses a second-stage symmetric flexible hinge amplification mechanism based piezoelectric stack micro-pump which comprises a one-way outlet valve, a one-way inlet valve, a valve cover, a pump cavity, buffer channels, elastic balls, a sealing ring, a vibration membrane, an upper flat plate, an amplification mechanism, a piezoelectric stack, piezoelectric stack electrodes, a bracket and a lower flat plate. By adopting the second-stage symmetric flexible hinge amplification mechanism based piezoelectric stack micro-pump provided by the invention, the upper flat plate below the vibration membrane is processed with the buffer channels, and a plurality of the elastic balls are internally arranged in the buffer channels respectively, so that when vibration of the vibration membrane enables a volume of the pump chamber to be compressed, the volume of the pump chamber can bear larger pressure and is expanded further, the volume of the pump chamber has larger buffer drive forcewhen being increased, an