Grinding pad and manufacturing method thereof

The invention relates to a grinding pad and a manufacturing method of the grinding pad, and is characterized in that when the grinding process is carried out, a slurry is not required to be used, or agrinding pad in an adjusting procedure and other manufacturing methods are not required. The grindin...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SI-HYEONG CHO, TAE-JIN PARK, DEOG-JU MOON, SUNG-HO PARK, YOUNG-GIL SEO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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