Sample conveying system applied to vacuum interconnection system

The invention discloses a sample conveying system applied to a vacuum interconnection system. The sample conveying system applied to the vacuum interconnection system comprises a vacuum pipeline, at least two sample supports, two vacuum lifting tables corresponding to the at least two sample support...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DING XIANGFEI, DING XIANGJIN, LU DI, DING SUN'AN, LU XIAOMING, HUANG ZENGLI, RUAN YINGHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a sample conveying system applied to a vacuum interconnection system. The sample conveying system applied to the vacuum interconnection system comprises a vacuum pipeline, at least two sample supports, two vacuum lifting tables corresponding to the at least two sample supports, at least one full-mechanical drive manipulator, at least one sample manipulator, and at least twovacuum magnetic rods. The full-mechanical drive manipulator is at least used for conveying a sample between the sample supports and driving an upper surface and a lower surface of the sample to overturn; the sample manipulator is at least used for fetching and sending the sample in the sample support to a corresponding device; and the two vacuum magnetic rods are used for driving the full-mechanical drive manipulator and the spoon-shaped sample manipulator. By adopting full-mechanical movement in vacuum, the sample is conveyed from one sample support to the other sample support or the device,and the upper surface and