Dry ice automatic cleaning table

The invention discloses a dry ice automatic cleaning table. The dry ice automatic cleaning table includes a press-fitting assembly used for preventing a whole substrate from warping, a second carriersupporting plate used for bearing a divided chip, and a pedestal used for fixing the whole substrate and/or divided chip. Through the abovementioned mode, the dry ice automatic cleaning table can adsorb and position a workpiece, and perform pressing and blocking protection on an element exposed area of the substrate; and the dry ice automatic cleaning table support dry ice cleaning of two productsat the same time, one piece of equipment can clean two products, thereby saving production input cost, and the dry ice automatic cleaning table also has a heating function, thereby preventing a moisture condensation phenomenon generated due to too low temperature. 本发明公开了种干冰自动清洗台，包括：用于防止整版基板翘曲的压装组件、用于承载分割后芯片的第二载具托板、用于固定整版基板和/或分割后芯片的底座。通过上述方式，本发明干冰自动清洗台，可对工件进行吸附、定位，对基板的元件裸露区域进行压挡保护；同时兼容2种产品进行干冰清洗，使台设备可清洗两种产品，节约生产投入成本，而且还带有加