TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM

A method may include: generating an ion beam from an ion source, the ion beam having an initial direction of propagation; deflecting the ion beam at an initial angle of inclination with respect to theinitial direction of propagation; passing the ion beam through an aperture in a magnetic assembly; a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SINCLAIR FRANK, BENVENISTE VICTOR, BUFF JAMES S
Format: Patent
Sprache:chi ; eng
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