TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM

A method may include: generating an ion beam from an ion source, the ion beam having an initial direction of propagation; deflecting the ion beam at an initial angle of inclination with respect to theinitial direction of propagation; passing the ion beam through an aperture in a magnetic assembly; a...

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Bibliographische Detailangaben
Hauptverfasser: SINCLAIR FRANK, BENVENISTE VICTOR, BUFF JAMES S
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A method may include: generating an ion beam from an ion source, the ion beam having an initial direction of propagation; deflecting the ion beam at an initial angle of inclination with respect to theinitial direction of propagation; passing the ion beam through an aperture in a magnetic assembly; and generating in the aperture, a quadrupole field extending along a first direction perpendicular to the initial direction of propagation of the ion beam, and a dipole field extending along a second direction perpendicular to the first direction and the initial direction of propagation. 种方法可包括:从离子源产生离子束,离子束具有初始传递方向;以相对于初始传递方向的初始倾斜角度偏转离子束;使离子束穿过在磁性组件中的孔;以及在孔中产生下述:沿着与离子束的初始传递方向垂直的第方向延伸的四极场以及沿着与第方向和初始传递方向垂直的第二方向延伸的偶极场。