Control system, control method and computer readable storage medium

The present invention provides a control system, a control method and a computer readable storage medium. The limitations on objects for which shape measurement is to be performed are reduced. A PLC system (SYS) includes a displacement sensor (7), drives (30, 40), and a PLC (1). When an unmeasurable condition is detected at a data obtaining position (Yes in step S2), the PLC system (SYS) moves thedisplacement sensor (7) back to the position at which the unmeasurable condition is detected (S8), and again performs measurement (S12). When an unmeasurable condition is detected again in the measurement (Yes in step S16), the PLC system SYS moves the stage to the next data obtaining position (S19), and again performs measurement (S22). 本发明提供控制系统及其控制方法、计算机可读存储介质，根据本发明能够减轻对待测量形状的对象物的限制。本発明的PLC系统(SYS)包括：位移传感器(7)、驱动装置(30、40)以及PLC(1)。PLC系统(SYS)判断为在某个获取位置不可测量时(S2的"是")，返回到该不可测量的获取位置(S8)，再次执行测量(S12)。在再次执行的测量过程中检测到不可测量时(S16的"是")，将载台移动到下个获取位置(S19)，再次执行测量(S22)。