TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY

Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signaturedataset and at least one other signature dataset associated with the at least one previously determined tool failure. 提出了利于与制造工艺相关联的工具故障分析的系统和技术。监测组件基于由与个或更多个制造工具相关联的组传感器生成的传感器数据来确定与所述个或更多个制造工具相关联的候选工具故障。签名组件基于与个或更多个制造工具相关联的数据来生成候选工具故障的签名数据集。比较组件基于签名数据集和与至少个之前确定的工具故障相关联的至少个其他签名数据集来将候选工具故障与至少个之前确定的工具故障进行比较。