Powder coating apparatus
The purpose of the present invention is to provide a powder coating apparatus in which there is no intermixing of impurities, which is able to form thin films in which freely selected elements have been combined and which meet the requirement that the composition of the thin film obtained is uniform...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The purpose of the present invention is to provide a powder coating apparatus in which there is no intermixing of impurities, which is able to form thin films in which freely selected elements have been combined and which meet the requirement that the composition of the thin film obtained is uniform. The present invention is the powder coating apparatus 100, which comprises a barrel 3, a dischargemeans 4 for evacuating the interior of the barrel, and a sputtering device 2 that is set inside the barrel. The barrel has a main shaft C oriented horizontally and rotates centered on the main shaft,and the sputtering device forms a coating film on the surface of a powder 7 that has been placed in the barrel, wherein in order to install at least two targets 2 in the sputtering device, the sputtering device has one fixing part 10 per one target, and when the targets are installed on the fixing parts, the respective targets are disposed parallel to each other at the same position with respectto the direction of the mai |
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