COAXIAL PROBE CARD DEVICE

A coaxial probe card device includes a substrate, a plurality of probe holders, and a plurality of probes. The substrate has a through hole. The plurality of probe holders is disposed on the substrateand is configured in a radial manner surrounding the through hole by using the through hole of the substrate as a center. Each probe holder has a probe slot, and the probe slot is inclined with respect to a surface of the substrate and extends towards the through hole of the substrate. The probes are individually disposed in the probe slots of the probe holders. 种同轴探针卡装置，包含基板、多个探针座与多个探针。基板具有穿孔，多个探针座设置于基板上且以基板的穿孔为中心而环绕穿孔呈辐射状配置。各探针座具有探针槽，探针槽相对于基板的表面倾斜且朝基板的穿孔的方向延伸，各探针个别设置于各探针座的探针槽中。