Silicon wafer transshipment and loading device and silicon wafer transshipment and loading method based on same

The present invention relates to a silicon wafer transshipment and loading device and a silicon wafer transshipment and loading method based on the same. The device comprises a rack, two railboat positioning feeding and blanking systems, a flower basket channel transshipment system and a double-end transshipment manipulator system. The two railboat positioning feeding and blanking systems are respectively arranged at left and right sides of the rack, the flower basket channel transshipment system is arranged at the middle portion of the rack and located between the two railboat positioning feeding and blanking systems, and the double-end transshipment manipulator system crosses the left and right sides of the rack and is located above the railboat positioning feeding and blanking systems and the flower basket channel transshipment system. 本发明涉及种硅片转运装载装置及基于其的硅片转运装载方法，所述装置包括机架、两石英舟定位上下料系统、花篮通道转运系统和双头转运机械手系统；两所述石英舟定位上下料系统分别设置于所述机架的左右两侧，所述花篮通道转运系统设置于所述机架的中部且位于两石英舟定位上下料系统之间，所述双头转运机械手系统横跨所述机架的左右两侧且位于所述石英舟定位上下料系统和花篮