SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

Provided is a substrate processing device comprising: a fixed cup body (51) that surrounds a substrate holding section (31) and is relatively immovable with respect to a processing container for receiving a processing liquid or a mist of the processing liquid which has been supplied to a substrate; a mist guard (80); and a guard lifting mechanism (84) for lifting and lowering the mist guard. The mist guard is provided to the outer side of the fixed cup body so as to surround the fixed cup body, and blocks liquid which splashes over and outward from the fixed cup body. The mist guard has a tubular tube part (81) and an overhanging section (82) which overhangs from the upper end of the tube part toward the side of the fixed cup body. 基板处理装置具备：固定杯体(51)，其包围基板保持部(31)并接受被供给到基板的处理液或处理液的雾，且相对于处理容器相对地不动；雾防护件(80)；以及防护件升降机构(84)，其使雾防护件升降。雾防护件以包围固定杯体的方式设置于固定杯体的外侧，对越过固定杯体的上方而向外方飞散的液进行阻断。雾防护件具有：筒状的筒部(81)；以及伸出部(82)，其从筒部的上端朝且向固定杯体的侧伸出。