Crystalline silicon solar cell graphite boat and saturation treatment method thereof

The invention relates to a crystalline silicon solar cell graphite boat and a saturation treatment method thereof. A layer of SiC film is plated between a SiNx film and the crystalline silicon solar cell graphite boat through the saturation treatment technology so that the graphite boat can be protected and the service life of the graphite boat can be prolonged by two years; a layer of SiNx is plated on the SiC film so that the uniformity of film plating can be effectively improved, the reworking rate of defective pieces is reduced, and the cost is reduced. 本发明涉及种晶硅太阳电池石墨舟及其饱和处理方法，通过饱和处理工艺使得述SiNx膜和晶硅太阳电池石墨舟之间还镀有层SiC膜，可以起到保护石墨舟的作用，增加石墨舟的使用寿命，使石墨舟的使用寿命延长2年，在SiC膜基础上镀层SiNx可有效的提高镀膜的均匀性，降低不良片的返工率，节省成本。