APPARATUS FOR COATING SUBSTRATES

An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in thevacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to heat the substrates; rotating means configured to rotate substrates relative to the one or more targets, the cooling unit and/or the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive the cooling unit and the heating unit. Thevacuum chamber defines a lifting axis along which the cooling unit and/or the heating unit and the lifting chamber are arranged, and the apparatus further comprises displacement means configured to displace the cooling unit and/or the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber. 种用于涂覆衬底的设备，包括真空腔室，具有开口和门，通过开口能够容纳衬底，以及门配置成密封开口；个或多个靶，布置在真空腔室中；配置成冷却衬底的冷却单元和/或配置成加热衬底的加热单元；旋转装置，配置成相