Micro-motion platform for photo-etching motion platform system and control method thereof

The invention relates to a micro-motion platform for a photo-etching motion platform system and a control method thereof. The micro-motion platform is mounted on a motion part of a workpiece platformand comprises a micro-motion plate and four vertical motors arranged at the bottom of the micro-motion plate; the four vertical motors are arranged at two sides of the micro-motion plate; each vertical motor is correspondingly provided with a sensor; an Rz motor is arranged between the two vertical motors at the same side; an air-floating decoupling device is arranged at a part which is no more than 30mm far away from the mass center of the micro-motion plate. According to the micro-motion platform provided by the invention, the four vertical motors and the four sensors are adopted to realizeredundancy control according to a redundancy driving principle and a redundancy measurement principle and the requirements on the frequency of the micro-motion plate are reduced; only if the frequencyof the micro-motion plate