HIGH-FREQUENCY WAVE SUPPLYING STRUCTURE

A high-frequency wave supplying structure includes a center conductor that extends in a specified direction, an outer conductor that is coaxial with the center conductor and grounded, and a cylindrical insulating member that is provided between the center conductor and the outer conductor. The distal end of the center conductor is a support portion that supports a workpiece W. A shield member is provided outward of the outer conductor to be coaxial with the outer conductor and the center conductor. The distal end of the shield member is located closer to the support portion in the specified direction than the distal end of the outer conductor. The insulating member includes a protruding portion that protrudes toward the support portion from an opening of the outer conductor. The protrudingportion is opposed to the distal end of the outer conductor in the specified direction. 本发明提供高频波供给构造。该高频波供给构造具备在规定方向X上延伸的中心导体、与中心导体同轴配置且接地的外侧导体、及设置在中心导体与外侧导体之间的圆筒形状的绝缘构件。中心导体的顶端是支承工件W的支承部。在比外侧导体靠外侧处配置有与外侧导体及中心导体同轴配置的防附着构件。防附