Segmented electrode structure for quadrature reduction in integrated device

An integrated device includes an MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative tothe substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass towardsense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass. 种集成装置包括例如陀螺仪等MEMS装置，所述MEMS装置具有与衬底间隔开的可移动块，所述可移动块被配置成相对于所述衬底在驱动方向上振荡。所述集成装置另外包括具有与MEMS装置耦合的表面的集成电路(IC)管芯，使得所述可移动块插入在所述衬底与所