Fluid distributor, fluid distribution control device and fluid distribution exception monitoring device

A fluid distributor comprises a fluid distribution pipeline, a micro electro mechanical sensor and a stop controller, wherein the fluid distribution pipeline is used for receiving and distributing fluid, the micro electro mechanical sensor is used for sensing the motion state of the fluid distributor and sends an exception signal when the motion state is abnormal, and the stop controller stops fluid distribution according to the exception signal. In addition, the invention provides a fluid distribution device and a fluid distribution exception monitoring device. 种流体配送器，包含：流体分配管路，用以接收并配送流体；微机电传感器，用于感测流体配送器的运动状态，其中当运动状态为异常状态时，微机电传感器送出异常讯号；以及截止控制器，根据异常讯号，截止流体的配送。此外，本发明还提出种流体配送控制装置及流体配送异常监控装置。