Substrate contaminant analysis device and substrate contaminant analysis method

A substrate contaminant analysis device according to the present invention, which is a substrate contaminant analysis device for transferring a sample solution, which is scanned by means of a scan nozzle on a substrate to be analyzed, from the scan nozzle to an analyzer through a flow path, comprises: a sample tube having a space into which the sample solution is to be loaded; and a switching valve, coupled to the sample tube, at least having a load position where the sample solution is loaded into the sample tube and an injection position from which the loaded sample solution is injected toward the analyzer, wherein the substrate contaminant analysis device includes gas intervals before and behind the sample solution when the sample solution is loaded into the sample tube, and further comprises a sensing sensor, installed in the sample tube, for sensing the gas intervals distinctly from the sample solution. 本发明的基板污染物分析装置，作为将从分析对象基板利用扫描喷嘴扫描的样品溶液通过流路从所述扫描喷嘴移送到分析器的基板污染物分析装置，其特征在于，包括：样品管，具有装载所述样品溶液的空间；转换阀，与所述样品管