Installation deviation calibration method of interferometer in multi-axis laser displacement measurement system
The invention discloses an installation deviation calibration method of an interferometer in a multi-axis laser displacement measurement system. The method includes: adding one or more redundant interferometers in a laser interferometer displacement measurement system; establishing displacement calc...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an installation deviation calibration method of an interferometer in a multi-axis laser displacement measurement system. The method includes: adding one or more redundant interferometers in a laser interferometer displacement measurement system; establishing displacement calculating equations including installation deviation of the laser interferometer and acquiring redundant measurement information by continuously measuring displacement information of multiple position points, wherein the number of the formed displacement calculating equations is equal to that of an unknown quantity; calculating the installation deviation of the interferometer by the aid of an equation set. With the installation deviation calibration method, self-calibration of the installation deviation is realized; the problem about difficult calibration of the installation deviation of the multi-axis interferometer in industrial application can be solved without assistance of displacement sensors higher in precisio |
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