Welding method of target assembly
Disclosed is a welding method of a target assembly. The method comprises the steps of providing a target material and a back plate, wherein the target material is provided with a first welding face, and the back plate is provided with a second welding face; adopting a turning process to form lines o...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Disclosed is a welding method of a target assembly. The method comprises the steps of providing a target material and a back plate, wherein the target material is provided with a first welding face, and the back plate is provided with a second welding face; adopting a turning process to form lines on the first welding face or the second welding face, and adopting the hot isostatic pressure processto enable the first welding face and the second welding face to be welded together. According to the welding method of the target assembly, the lines are formed on the first welding face so as to increase roughness of the first welding face, or the lines are formed on the second welding face to increase roughness of the second welding face; in the hot isostatic pressure process, the lines on thefirst welding face can be embedded on the back plate or the lines on the second welding face can be embedded in a target material; atom diffusion between the target material and the back late is facilitated in the hot isostati |
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