Manufacturing method of metal-ceramic composite substrate and composite substrate manufactured through manufacturing method

The invention discloses a manufacturing method of a metal-ceramic composite substrate and the composite substrate manufactured through the manufacturing method and belongs to the technical field of ceramic metallization. The manufacturing method comprises the following steps of forming a first brazi...

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Bibliographische Detailangaben
Hauptverfasser: QIAN JIANBO, YU YAN, SUN LIN, HU SHIGANG, YUAN CHAO, WANG GUFENG, HUANG SHIDONG, WANG TAIBAO, NIE CHAOXUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a manufacturing method of a metal-ceramic composite substrate and the composite substrate manufactured through the manufacturing method and belongs to the technical field of ceramic metallization. The manufacturing method comprises the following steps of forming a first brazing material layer on the surface of a ceramic substrate, wherein the first brazing material layer isa copper, silver and active metal brazing material layer; forming a second brazing material layer on the surface of the first brazing material layer, wherein the second brazing material layer is a copper and silver brazing material layer; forming a copper layer on the surface of the second brazing material layer; and sintering a metal-ceramic composite substrate precursor in vacuum. According tothe manufacturing method, an active metal in the first brazing material layer reacts with ceramic during vacuum sintering, so that the binding force is high and the thermal shock resistance is high. Copper and silver in the se