MEMS device for harvesting sound energy and methods for fabricating same

MEMS device for harvesting sound energy and methods for fabricating same

Micro-Electro-Mechanical System (MEMS) devices for harvesting sound energy and methods for fabricating MEMS devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disp...

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Hauptverfasser: CHATTERJEE AVEEK NATH, KUMAR RAKESH
Format: Patent
Sprache:chi ; eng
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DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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creator CHATTERJEE AVEEK NATH
KUMAR RAKESH
description Micro-Electro-Mechanical System (MEMS) devices for harvesting sound energy and methods for fabricating MEMS devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disposed over a semiconductor substrate and including a suspended structure in a cavity. Further, the method includes etching the semiconductor substrate to form an acoustic port through the semiconductor substrate configured to allow acoustic pressure to deflect the suspended structure. 提供用于采收声能的微机电系统(MEMS)装置以及用于采收声能的MEMS装置的制造方法。在具体实施例中，用于采收声能的MEMS装置的制造方法包括：形成设置于半导体衬底上方且在空腔中包括悬浮结构的压敏MEMS结构。此外，该方法包括：蚀刻该半导体衬底以形成穿过该半导体衬底的声埠，其经组构成允许声压使该悬浮结构偏位。
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In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disposed over a semiconductor substrate and including a suspended structure in a cavity. Further, the method includes etching the semiconductor substrate to form an acoustic port through the semiconductor substrate configured to allow acoustic pressure to deflect the suspended structure. 提供用于采收声能的微机电系统(MEMS)装置以及用于采收声能的MEMS装置的制造方法。在具体实施例中，用于采收声能的MEMS装置的制造方法包括：形成设置于半导体衬底上方且在空腔中包括悬浮结构的压敏MEMS结构。此外，该方法包括：蚀刻该半导体衬底以形成穿过该半导体衬底的声埠，其经组构成允许声压使该悬浮结构偏位。</description><language>chi ; eng</language><subject>DEAF-AID SETS ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRICITY ; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS ; PUBLIC ADDRESS SYSTEMS</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20171229&amp;DB=EPODOC&amp;CC=CN&amp;NR=107529122A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20171229&amp;DB=EPODOC&amp;CC=CN&amp;NR=107529122A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHATTERJEE AVEEK NATH</creatorcontrib><creatorcontrib>KUMAR RAKESH</creatorcontrib><title>MEMS device for harvesting sound energy and methods for fabricating same</title><description>Micro-Electro-Mechanical System (MEMS) devices for harvesting sound energy and methods for fabricating MEMS devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disposed over a semiconductor substrate and including a suspended structure in a cavity. Further, the method includes etching the semiconductor substrate to form an acoustic port through the semiconductor substrate configured to allow acoustic pressure to deflect the suspended structure. 提供用于采收声能的微机电系统(MEMS)装置以及用于采收声能的MEMS装置的制造方法。在具体实施例中，用于采收声能的MEMS装置的制造方法包括：形成设置于半导体衬底上方且在空腔中包括悬浮结构的压敏MEMS结构。此外，该方法包括：蚀刻该半导体衬底以形成穿过该半导体衬底的声埠，其经组构成允许声压使该悬浮结构偏位。</description><subject>DEAF-AID SETS</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRICITY</subject><subject>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</subject><subject>PUBLIC ADDRESS SYSTEMS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPDwdfUNVkhJLctMTlVIyy9SyEgsKkstLsnMS1cozi_NS1FIzUstSq9USAQyc1NLMvJTisHq0hKTijKTEyEKE3NTeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYjLQoJJ4Zz9DA3NTI0tDIyNHY2LUAABbODPO</recordid><startdate>20171229</startdate><enddate>20171229</enddate><creator>CHATTERJEE AVEEK NATH</creator><creator>KUMAR RAKESH</creator><scope>EVB</scope></search><sort><creationdate>20171229</creationdate><title>MEMS device for harvesting sound energy and methods for fabricating same</title><author>CHATTERJEE AVEEK NATH ; KUMAR RAKESH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN107529122A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2017</creationdate><topic>DEAF-AID SETS</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRICITY</topic><topic>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</topic><topic>PUBLIC ADDRESS SYSTEMS</topic><toplevel>online_resources</toplevel><creatorcontrib>CHATTERJEE AVEEK NATH</creatorcontrib><creatorcontrib>KUMAR RAKESH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHATTERJEE AVEEK NATH</au><au>KUMAR RAKESH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS device for harvesting sound energy and methods for fabricating same</title><date>2017-12-29</date><risdate>2017</risdate><abstract>Micro-Electro-Mechanical System (MEMS) devices for harvesting sound energy and methods for fabricating MEMS devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disposed over a semiconductor substrate and including a suspended structure in a cavity. Further, the method includes etching the semiconductor substrate to form an acoustic port through the semiconductor substrate configured to allow acoustic pressure to deflect the suspended structure. 提供用于采收声能的微机电系统(MEMS)装置以及用于采收声能的MEMS装置的制造方法。在具体实施例中，用于采收声能的MEMS装置的制造方法包括：形成设置于半导体衬底上方且在空腔中包括悬浮结构的压敏MEMS结构。此外，该方法包括：蚀刻该半导体衬底以形成穿过该半导体衬底的声埠，其经组构成允许声压使该悬浮结构偏位。</abstract><oa>free_for_read</oa></addata></record>
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subjects DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
title MEMS device for harvesting sound energy and methods for fabricating same
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