MEMS device for harvesting sound energy and methods for fabricating same

Micro-Electro-Mechanical System (MEMS) devices for harvesting sound energy and methods for fabricating MEMS devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a MEMS device for harvesting sound energy includes forming a pressure sensitive MEMS structure disposed over a semiconductor substrate and including a suspended structure in a cavity. Further, the method includes etching the semiconductor substrate to form an acoustic port through the semiconductor substrate configured to allow acoustic pressure to deflect the suspended structure. 提供用于采收声能的微机电系统(MEMS)装置以及用于采收声能的MEMS装置的制造方法。在具体实施例中，用于采收声能的MEMS装置的制造方法包括：形成设置于半导体衬底上方且在空腔中包括悬浮结构的压敏MEMS结构。此外，该方法包括：蚀刻该半导体衬底以形成穿过该半导体衬底的声埠，其经组构成允许声压使该悬浮结构偏位。