ARC TREATMENT DEVICE AND METHOD THEREFOR

An arc treatment device (14) comprises: a. An arc detection device (21) detecting an arc being present in a plasma chamber (30); b. An arc energy determination device (22) for determining an arc energy value which is a value corresponding to the energy supplied to the plasma chamber (30) while the a...

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Bibliographische Detailangaben
Hauptverfasser:	LACH PIOTR, ZELECHOWSKI MARCIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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