ARC TREATMENT DEVICE AND METHOD THEREFOR

An arc treatment device (14) comprises: a. An arc detection device (21) detecting an arc being present in a plasma chamber (30); b. An arc energy determination device (22) for determining an arc energy value which is a value corresponding to the energy supplied to the plasma chamber (30) while the a...

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Bibliographische Detailangaben
Hauptverfasser: LACH PIOTR, ZELECHOWSKI MARCIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:An arc treatment device (14) comprises: a. An arc detection device (21) detecting an arc being present in a plasma chamber (30); b. An arc energy determination device (22) for determining an arc energy value which is a value corresponding to the energy supplied to the plasma chamber (30) while the arc is present in the plasma chamber (30); c. A break time determination device (24) for determining a break time from the determined arc energy value. 种电弧处理设备(14)包括:a.电弧检测设备(21),其检测等离子体腔(30)中是否存在电弧;b.电弧能量确定设备(22),其用于确定电弧能量值,所述电弧能量值是对应于当所述等离子体腔(30)中存在所述电弧时被供应到所述等离子体腔(30)的能量的值;c.切断时间确定设备(24),其用于根据所确定的电弧能量值确定切断时间。