Static pressure gas bearing

Static pressure gas bearing

A static pressure gas bearing is provided. The static pressure gas bearing to be used in a vacuum environment is provided with a guide shaft and a tubular slider (20) that houses the guide shaft while being capable of moving in the axial direction. The slider (20) is configured by fastening multiple...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YOSHIDA TATSUYA, SAKAKI KAZUTOSHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BEARINGS
BLASTING
ELEMENTS OR CRANKSHAFT MECHANISMS
ENGINEERING ELEMENTS AND UNITS
FLEXIBLE SHAFTS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
ROTARY BODIES OTHER THAN GEARING ELEMENTS
SHAFTS
THERMAL INSULATION IN GENERAL
WEAPONS
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Beschreibung
Zusammenfassung:A static pressure gas bearing is provided. The static pressure gas bearing to be used in a vacuum environment is provided with a guide shaft and a tubular slider (20) that houses the guide shaft while being capable of moving in the axial direction. The slider (20) is configured by fastening multiple plate-shaped members (20A-20D). A film (24) obtained from a soft material with a smaller elastic modulus than the plate-shaped members is interposed between the bonding surfaces of the plate-shaped members. 本发明提供种静压气体轴承。在真空环境下使用的静压气体轴承具备：引导轴；及容纳引导轴且沿轴向能够移动的筒状的滑块(20)。滑块(20)通过将多个板状部件(20A～20D)连结而构成。在板状部件彼此之间的接合面存在由弹性模量小于板状部件的弹性模量且比板状部件柔软的材料制成的膜(24)。