Seed crystal holder for pulling single crystal and method for manufacturing silicon single crystal using same

The invention provides a seed crystal holder for pulling a single crystal which is capable of preventing stress concentration in a seed crystal, and a safe and highly reliable method for manufacturing a silicon single crystal using the seed crystal holder. The seed crystal holder (1) is made of a ca...

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1. Verfasser: KAWASAKI EIICHI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a seed crystal holder for pulling a single crystal which is capable of preventing stress concentration in a seed crystal, and a safe and highly reliable method for manufacturing a silicon single crystal using the seed crystal holder. The seed crystal holder (1) is made of a carbon-fiber-reinforced carbon composite material and is a substantially cylindrical member having a hollow portion (10h) which has a shape that matches an external shape of a substantially rod-like seed crystal (9). The direction of a carbon fiber (10f) of at least the portion that comes in contact with a circumferential surface of the seed crystal (9) has a circumferential direction component. The seed crystal holder (1) is isotropic from a central axis (Z) of the hollow portion (10h). 本发明提供种能够防止晶种内的应力集中的单晶提拉用晶种保持器以及使用该晶种保持器的安全且可靠性高的硅单晶的制造方法。晶种保持器(1)由碳纤维强化碳复合材料构成,且为具有与大致棒状的晶种(9)的外形相符的形状的空心部(10h)的大致圆筒状部件,至少与晶种(9)的外周面接触的部分的碳纤维(10f)的方向具有周向成分,从空心部(10h)的中心轴(Z)观察时具有各向同性。