Small-scale plasma generator with ultrahigh frequency power supply

The invention discloses a small-scale plasma generator with an ultrahigh frequency power supply. The key point of the technical solution is that the small-scale plasma generator with the ultrahigh frequency power supply comprises a frame installed as a square. A plurality of electrodes is parallelly...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIAO YANG, CUI LIANJUN, GE JIANFENG, HE HUILIU, WU JUN, LYU YUBO, WANG LIU, ZHOU YAJIAN, CAO WENSHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a small-scale plasma generator with an ultrahigh frequency power supply. The key point of the technical solution is that the small-scale plasma generator with the ultrahigh frequency power supply comprises a frame installed as a square. A plurality of electrodes is parallelly installed in the frame. The electrodes are connected with the ultrahigh frequency power supply. Quartz tubes are sheathed outside the electrodes. The electrodes comprise positive electrodes and negative electrodes. The positive electrodes are installed at the side face of the negative electrodes, and the positive electrodes and the negative electrodes are alternately installed. The positive electrodes are fixed at the top of the frame, and the negative electrodes are fixed at the bottom of the frame. Because the positive electrodes and the negative electrodes are alternately installed, the transverse distance of the positive electrodes and the negative electrodes can be reduced on the same frame, so more positive