Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method

The present invention is a measurement processing device for use in an X-ray inspection device, and the measurement processing device is provided with the following: a region information acquisition unit that acquires first region information based on X-rays transmitted through a first region which...

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Bibliographische Detailangaben
Hauptverfasser: KAWAI AKITOSHI, YASHIMA HIROTOMO, HAYANO FUMINORI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention is a measurement processing device for use in an X-ray inspection device, and the measurement processing device is provided with the following: a region information acquisition unit that acquires first region information based on X-rays transmitted through a first region which is part of a first object for inspection; a storage unit that stores second region information relating to a second region of a second object for inspection which is larger than the first region; and a determination unit that determines, on the basis of the first region information and the second region information, whether a region corresponding to the first region is included in the second region. 种用于X射线检查装置的测量处理装置,具备:区域信息获得部,其获得基于透射第被测量物的部分即第区域的X射线的第区域信息;存储部,其存储比第区域大的、与第二被测量物的第二区域有关的第二区域信息;判断部,其基于第区域信息和第二区域信息,判断与第区域对应的区域是否包括在第二区域中。