Silicon carbonitride blue light emitting film and preparation method thereof

Silicon carbonitride blue light emitting film and preparation method thereof

The invention relates to a silicon carbonitride blue light emitting film and a preparation method thereof. A chemical formula of the blue light emitting film is SiCxNy, wherein x ranges from 0.3 to 0.4, and y ranges from 0.8 to 0.9. Magnetron sputtering cladding equipment is adopted to prepare the s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG SHUQING, CHEN YUEFENG, LEI GUIBIN, PENG YINQIAO, GAN YUANJU, WU YINGCAI
Format: Patent
Sprache:chi ; eng
Schlagworte:
ADHESIVES
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
DYES
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:The invention relates to a silicon carbonitride blue light emitting film and a preparation method thereof. A chemical formula of the blue light emitting film is SiCxNy, wherein x ranges from 0.3 to 0.4, and y ranges from 0.8 to 0.9. Magnetron sputtering cladding equipment is adopted to prepare the silicon carbonitride blue light emitting film; and after being annealed, the silicon carbonitride film has emitted blue light with luminescence spectrums of 451nm and 490nm. 本发明涉及种硅碳氮蓝光发光薄膜及其制备方法；该蓝光发光薄膜的化学通式为SiCN，x取值0.3~0.4，y取值0.8~0.9。本发明采用磁控溅射镀膜设备制备硅碳氮蓝光发光薄膜；该硅碳氮薄膜经退火后，其发光光谱出现了较强的451nm和490 nm的蓝光发光。