PIEZOELECTRIC MICRO-ELECTROMECHANICAL SYSTEM (MEMS)

A Microelectromechanical System (MEMS) device which includes a piezoelectric stack on a substrate separated by a dielectric layer is disclosed. The piezoelectric stack includes first and second piezoelectric layers with a first electrode below the first piezoelectric layer and a contact pad and a second electrode between the first and second piezoelectric layers. A first contact extends through the piezoelectric layers and contact pad to the first electrode and a second contact extends through the second piezoelectric layer to the second electrode. The contact pad prevents an interface to form between the first and second piezoelectric layers in the contact opening, thus preventing corrosion of the piezoelectric layers during contact formation process. 本发明涉及压电微机电系统，为种在通过介电层分离的衬底上包括压电堆栈的微机电系统(MEMS)装置。压电堆栈包括第压电层与第二压电层，其具有位在第压电层与接触垫下面的第电极、以及位在第压电层与第二压电层间的第二电极。第接触穿过压电层与接触垫延展至第电极，而第二接触穿过第二压电层延展至第二电极。接触垫防止接触开口中的第压电层与第二压电层间形成接口，从而防止压电层在接触形成过程中遭受侵蚀。