ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY

Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns. 本发明涉及pMUT及pMUT换能器阵列的电极配置，根据本文所述例示性具体实施例所提供的是各具有第电极的压致微机械超音波换能器(pMUT)，该第电极包括第电极部与第二电极部。该第二电极部可与该第电极部分别操作。第二电极与该第电极隔开并且在该第电极与该第二电极间界定空间。压电材料设置于该空间中。还提供的是pMUT的阵列，其中个别pMUT具有可与阵列诸列操作性联结的第电极部、以及可与阵列诸行操作性联结的第二电极部。