Manufacturing method of flexible substrate, flexible substrate and flexible display panel

The invention belongs to the field of display panels, and specifically relates to a manufacturing method of a flexible substrate, the flexible substrate and a flexible display panel. The manufacturing method comprises: providing a glass substrate, and forming a first flexible material layer on the surface of the glass substrate; depositing a barrier inorganic layer on the surface of the first flexible material layer, wherein the barrier inorganic layer comprises at least one of a silicon oxide material layer and a silicon nitride material layer; when the barrier inorganic layer is deposited, performing plasma bombardment on the surface of the barrier inorganic layer to improve the wettability of the surface of the barrier inorganic layer; forming a second flexible material layer on the surface of the barrier inorganic layer, and peeling the glass substrate. The method can ensure that the second flexible material layer is well attached to the barrier inorganic layer to form a film, does not need to additionall