Intelligent arc ion source
The invention relates to an intelligent arc ion source which comprises an electromagnetic coil module, a target material, a water cooling module and a permanent magnet module. The water cooling module comprises a copper cathode body, a cathode body cover and a water-through threaded rod, a water coo...
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| creator | XIN YUFU LIN ZENG QIAO HONG WANG SHUHAO |
| description | The invention relates to an intelligent arc ion source which comprises an electromagnetic coil module, a target material, a water cooling module and a permanent magnet module. The water cooling module comprises a copper cathode body, a cathode body cover and a water-through threaded rod, a water cooling channel is arranged in the copper cathode body, the cathode body cover is fixedly connected with the copper cathode body, and the water-through threaded rod is a hollow pipe and penetrates the cathode body cover to be communicated with the water cooling channel. The cathode body cover is connected with the electromagnetic coil module through a connecting piece, the target material is fixed to the copper cathode body, and the permanent magnet module is fixed to the water-through threaded rod. According to the arc ion source, traditional large plane cooling is replaced with water way cooling, the problem of cooling water retention is solved, and cooling is relatively even. The target material is cooled from the |
| format | Patent |
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The water cooling module comprises a copper cathode body, a cathode body cover and a water-through threaded rod, a water cooling channel is arranged in the copper cathode body, the cathode body cover is fixedly connected with the copper cathode body, and the water-through threaded rod is a hollow pipe and penetrates the cathode body cover to be communicated with the water cooling channel. The cathode body cover is connected with the electromagnetic coil module through a connecting piece, the target material is fixed to the copper cathode body, and the permanent magnet module is fixed to the water-through threaded rod. According to the arc ion source, traditional large plane cooling is replaced with water way cooling, the problem of cooling water retention is solved, and cooling is relatively even. The target material is cooled from the</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171124&DB=EPODOC&CC=CN&NR=107385397A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171124&DB=EPODOC&CC=CN&NR=107385397A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>XIN YUFU</creatorcontrib><creatorcontrib>LIN ZENG</creatorcontrib><creatorcontrib>QIAO HONG</creatorcontrib><creatorcontrib>WANG SHUHAO</creatorcontrib><title>Intelligent arc ion source</title><description>The invention relates to an intelligent arc ion source which comprises an electromagnetic coil module, a target material, a water cooling module and a permanent magnet module. 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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Intelligent arc ion source |
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