Intelligent arc ion source

The invention relates to an intelligent arc ion source which comprises an electromagnetic coil module, a target material, a water cooling module and a permanent magnet module. The water cooling module comprises a copper cathode body, a cathode body cover and a water-through threaded rod, a water cooling channel is arranged in the copper cathode body, the cathode body cover is fixedly connected with the copper cathode body, and the water-through threaded rod is a hollow pipe and penetrates the cathode body cover to be communicated with the water cooling channel. The cathode body cover is connected with the electromagnetic coil module through a connecting piece, the target material is fixed to the copper cathode body, and the permanent magnet module is fixed to the water-through threaded rod. According to the arc ion source, traditional large plane cooling is replaced with water way cooling, the problem of cooling water retention is solved, and cooling is relatively even. The target material is cooled from the