Chamber leak detection method and device

The invention discloses a chamber leak detection method and device. The chamber leak detection method comprises a step of performing a cleaning process on a chamber and then carrying out a plasma reaction; and a step of detecting leak of the chamber by analyzing the plasma reaction. The chamber leak...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YU,IM SOO, WOO,BONG JOO, LEE,SOON JONG, LEE,DONG SEOK
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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