Controllable upper disc structure and polishing device
The invention provides a controllable upper disc structure and a polishing device, and relates to the technical field of high-precision polishing. The controllable upper disc structure comprises upper disc regulating parts, an installing disc and a driving device, wherein an upper disc is arranged a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a controllable upper disc structure and a polishing device, and relates to the technical field of high-precision polishing. The controllable upper disc structure comprises upper disc regulating parts, an installing disc and a driving device, wherein an upper disc is arranged at the bottom of the installing disc through the upper disc regulating parts, the installing disc is driven by the driving device to move up and down, the upper disc is movably arranged on the installing disc in an up-and-down manner through the upper disc regulating parts, the installing disc is provided with a pressure sensor connected with a controller, and the controller is connected with the driving device. According to the controllable upper disc structure, the pressure sensor connected with the controller is arranged on the installing disc, and the pressure sensor feeds detected upper disc pressure to the controller, so that the driving device is controlled to drive the installing disc to move up and down, or |
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