Non-contact type MEMS self-exciting electrostatic field detection system and method based on principle of electrostatic induction

The invention provides a non-contact type MEMS self-exciting electrostatic field detection system and method based on the principle of electrostatic induction. The system comprises an electrostatic sensor, an amplification circuit, a filtering circuit, a microcontroller, and a display device. The electrostatic sensor comprises a self-drive unit and an electrostatic induction probe, wherein the self-drive unit is a self-drive self-feedback module which consists of a graphical piezoelectric drive film and a graphical piezoelectric induction film, which are placed in a parallel manner. The electrostatic induction probe is a graphical metal electrode layer, and the electrostatic induction probe is connected with a rear end amplification circuit. The microcontroller is used for processing an electric signal, and controlling the display device to output a measurement result. Compared with a conventional rotary-vane type electrostatic detection system which is large in size and a conventional vibration-type detectio