Hole diameter measurement device and hole diameter measurement method for through hole in conductive structure

The invention discloses a hole diameter measurement device and a hole diameter measurement method for a through hole in a conductive structure, so as to reduce the hole diameter measurement time. The hole diameter measurement device comprises a hole diameter measurement part, a first wire, a second...

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Bibliographische Detailangaben
Hauptverfasser: GUO RUWANG, WANG JIE, CHEN HAIFENG, LI DINGYUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a hole diameter measurement device and a hole diameter measurement method for a through hole in a conductive structure, so as to reduce the hole diameter measurement time. The hole diameter measurement device comprises a hole diameter measurement part, a first wire, a second wire and a measurement module, wherein the hole diameter measurement part comprises a plurality of resistance sections with different diameters, and the resistance sections are in serial connection sequentially according to a sequence of diameter increasing or decreasing; the hole diameter measurement part is inserted in the through hole; one end of the first wire is connected with the outermost end of a resistance section with the largest diameter, and the other end is connected with the measurement module; one end of the second wire is connected with the periphery of the insertion port of the through hole, and the other end is connected with the measurement module; and the measurement module is used for measuring