Method for epitaxial growth of light emitting diode

The invention provides a method for epitaxial growth of a light emitting diode, which comprises the following steps: providing a substrate; and growing an unintentionally doped GaN layer on the substrate in an epitaxial manner. The epitaxial growth of the unintentionally doped GaN layer lasts a plur...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN KAIXUAN, ZHUO XIANGJING, WANG YANG, JIANG WEI, LIN ZHIWEI, TONG JICHU, YAO GANG
Format: Patent
Sprache:chi ; eng
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