Control device and control method for ion plating arc spots

The invention relates to a control device and control method for ion plating arc spots. The control device comprises a target, an electromagnetic field module and a permanent magnetic field module, wherein the electromagnetic field module and the permanent magnetic field module are arranged on the f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIN YUFU, LIN ZENG, WANG SHUHAO, WANG QING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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